BROOKS SLA5800 SERIES MASS FLOW CONTROLLER - 產品介紹

BROOKS 質量流量控制器

BROOKS SLA5800 SERIES MASS FLOW CONTROLLER

BROOKS SLA5850 MASS FLOW CONTROLLER質量流量控制器
MASS FLOW CONTROLLER BROOKS SLA5800 SERIES
BROOKS布魯克斯 ® SLA5800數位化壓力量測與控制系列是運用BROOKS布魯克斯卓越的質流量設計，並將其應用於製程壓力上。 SLA5800壓力控制器系列能選擇準確地控制上游或下游的壓力。此產品已在國際上經認可適用在各種服務領域。
廠牌 : BROOKS

詳細介紹

BROOKS SLA5800系列質量流量控制器
MASS FLOW CONTROLLER

	SLA5850	SLA5851	SLA5853	SLA5860	SLA5861
Product Type	Mass Flow Controller	Mass Flow Controller	Mass Flow Controller	Mass Flow Meter	Mass Flow Meter
Differentiator	Controller Flow Range	Controller Flow Range	Controller Flow Range	Meter Flow Range	Meter Flow Range
Flow Range (Full Scale Capacity)	0.003 - 50 slpm	15 - 150 slpm	100 - 2500 slpm	0.003 - 50 slpm	15 - 150 slpm
Max Pressure	1500 psi / 103 bar Optional 4500 psi / 310 bar	1500 psi / 103 bar	1000 psi / 70 bar	1500 psi / 103 bar Optional: 4500 psi / 310 bar	1500 psi / 103 bar
Accuracy	±0.6% of SP	±0.6% of SP	±0.6% of SP 1100 slpm up to 2500 slpm: ±0.6% of FS	±0.6% of SP	±0.6% of SP

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